Researchers develop integrated nanomechanical sensor for atomic force microscopy

From PhysOrg.com:

As reported in Nano Letters, CNST researchers have fabricated a novel integrated sensor combining a nanomechanical cantilever probe with a high sensitivity nanophotonic interferometer on a single silicon chip. Replacing the bulky laser detection system allowed them to build cantilevers orders of magnitude smaller than those used in conventional AFMs.

Because each of these smaller structures has an effective mass less than a picogram, the detection bandwidth is dramatically increased, reducing the system response time to a few hundred nanoseconds.

Continued

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